评论了国内外化学气相沉积的异质外延金刚石膜制备技术、性质表征以及应用和展望。
The major aspects of the recent development in the growth, characterization and applications of the hetero epitaxial diamond films by chemical vapor deposition were reviewed.
评论了国内外化学气相沉积的异质外延金刚石膜制备技术、性质表征以及应用和展望。
The major aspects of the recent development in the growth, characterization and applications of the hetero epitaxial diamond films by chemical vapor deposition were reviewed.
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