The methods reduce or prevent plasma-induced charge damage to the substrates from the deposition of the amorphous carbon films.
这些方法减少或防止等离子体感应电荷由于无定形碳薄膜的沉积而损坏衬底。
We have developed a new process for building up thick and stable amorphous carbon films with high hardness and low internal stress.
本文研究了一种制备高硬度、低内应力、厚度高且热稳定性良好的非晶碳薄膜的方法。
Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated.
用椭圆偏振光谱法研究了热处理对射频辉光放电淀积的氢化非晶碳膜光学性质的影响。
This paper reports the properties of the hydrogenated amorphous carbon films prepared by glow discharge decomposition of hydrocarbon and the applications to metals surface protection.
本文报导由碳氢气体的辉光放电分解而制备的氢化非晶碳膜的特性及其在金属表面防护上的应用。
Tetrahedral amorphous carbon (ta-C) films have been deposited on P-type (100) polished c-silicon wafer with different substrate negative bias by filtered cathodic vacuum arc technology.
采用过滤阴极真空电弧技术并施加一定的衬底负偏压，在P（100）单晶硅片上制备出四面体非晶碳薄膜。
The amorphous carbon film has interesting properties which are close to those of diamond. It may be good used for the antiabrasion layers and antireflexions films of the infrared devices.
非晶态碳膜具有许多接近于金刚石的、令人感兴趣的性能，能很好地用作红外零件上的保护膜和增透膜。
The amorphous carbon film has interesting properties which are close to those of diamond. It may be good used for the antiabrasion layers and antireflexions films of the infrared devices.
非晶态碳膜具有许多接近于金刚石的、令人感兴趣的性能，能很好地用作红外零件上的保护膜和增透膜。
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