该文利用有限元法对电容式角位移传感器三维电场进行分析，仿真研究不同结构参数的敏感元件，所得结论与实验结果吻合。
Electric field of capacitive angular sensor are analyzed by finite element methodology. Sensors with different dimensions are studied by simulation. The result is proved by the experiment.
该文利用有限元法对电容式角位移传感器三维电场进行分析，仿真研究不同结构参数的敏感元件，所得结论与实验结果吻合。
Electric field of capacitive angular sensor are analyzed by finite element methodology. Sensors with different dimensions are studied by simulation. The result is proved by the experiment.
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