研究了区熔再结晶(ZMR)设备及其工艺特点。
ZMR (zone melting recrystallization) apparatus is introduced, and the processing characteristic of ZMR is studied.
研究了陶瓷衬底上多晶硅薄膜的生长和区熔再结晶。
In this paper, growth and recrystallization of silicon films on ceramic substrates were studied.
研究了陶瓷衬底上多晶硅薄膜的生长和区熔再结晶。
In this paper, growth and recrystallization of silicon films on ceramic substrates were studied.
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