在热丝化学气相沉积金刚石系统中，衬底温度是影响金刚石成膜质量的关键因素之一。
In HFCVD system the substrate temperature is a key factor which deeply affects the quality of diamond films.
本工作利用热丝化学气相沉积(HFCVD)法获得了(100)取向不同质量的金刚石薄膜，并制备了CVD金刚石辐射探测器。
In present work, (100) oriented CVD diamond films with different quality obtained by a hot-filament chemical vapor deposition (HFCVD) technique were used to fabricate radiation detectors.
采用热丝化学气相沉积法在覆盖c _(60)膜的硅基片上沉积金刚石膜，研究了金刚石膜的成核与生长。
In this paper, the diamond films were grown on the C_ (60) -coated silicon substrate by using hot-filament chemical vapor deposition technique. The diamond nucleation and growth were studied.
采用热丝化学气相沉积生长出优异的金刚石薄膜。
High quality diamond thin films were grown by hot-filament chemical vapor deposition.
用XL 30feg扫描电镜对热丝化学气相沉积(HFCVD)法合成的金刚石颗粒的初期生长过程进行了研究。
The initial growth process of diamond grain synthesized by HFCVD method was investigated by using XL30FEG SEM.
用热丝化学气相沉积制备了碳纳米管，并用扫描电子显微镜和透射电子显微镜研究了它们的结构。
Carbon nanotubes (CNTs) were deposited by hot filament CVD and their structures were investigated by scanning electron microscopy and transmission electron microscopy.
用热丝化学气相沉积制备了碳纳米管，并用扫描电子显微镜和透射电子显微镜研究了它们的结构。
Carbon nanotubes (CNTs) were deposited by hot filament CVD and their structures were investigated by scanning electron microscopy and transmission electron microscopy.
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