对聚焦离子束曝光技术作了介绍。
In this paper, Focused Ion Beam Lithography technology and is introduced.
概述了聚焦离子束直接写入、离子研磨、离子注入及离子沉积技术。
An overview of the FIB direct write technique, applications in milling, implantation, and deposition is given.
概述了聚焦离子束直接写入、离子研磨、离子注入及离子沉积技术。
An overview of the FIB direct write technique, applications in milling, implantation, and deposition is given.
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