其次分析影响相位光栅对准标记衍射效率的主要因素槽深、占空比和反射率；
Alignment signal of phase grating alignment mark and the factors of influece of alignment signal are analysed secondly;
其次分析影响相位光栅对准标记衍射效率的主要因素槽深、占空比和反射率；
Alignment signal of phase grating alignment mark and the factors of influece of alignment signal are analysed secondly;
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