The method has been successfully used in the system for measuring the 3-d surface topography of diffractive optical elements.
此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。
How to measure the 3-D surface topography of the micro-specimens quickly and accurately has become a challenge in the field of modern micro-measurement.
如何快速准确检测微观轮廓形貌，已成为现代精密测试技术与仪器研究的重要课题，所研究的并行共焦探测方法是使微小轮廓的快速高精度检测成为可能。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
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