In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.

着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。

youdao

In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.

着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。

youdao