A scheme for autonomous control of aerostatic bearing used in large-sized photoelectric precision instrument is proposed.
提出一种用于大型光电精密仪器的自主控制静压气体轴承方案。
A scheme for autonomous control of aerostatic bearing used in large-sized photoelectric precision instrument is proposed.
提出一种用于大型光电精密仪器的自主控制静压气体轴承方案。
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