A linewidth stabilizing method for defocusing laser direct writing is proposed for further improvement of line quality of diffractive optical elements.
为了提高激光直写加工衍射光学元件时的线条质量，提出一种离焦激光直写的线宽稳定方法。
A linewidth stabilizing method for defocusing laser direct writing is proposed for further improvement of line quality of diffractive optical elements.
为了提高激光直写加工衍射光学元件时的线条质量，提出一种离焦激光直写的线宽稳定方法。
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