The invention can reduce the formation of depression on the side walls of the groove contained in the dual-damascene structure;
可减少形成于所述双镶嵌结构内包含的沟槽侧壁上的凹陷的产生；
The invention provides a method for forming a groove and a dual damascene structure.
本发明提出一种形成沟槽及双镶嵌结构的方法。
The invention provides a method for forming a groove and a dual damascene structure.
本发明提出一种形成沟槽及双镶嵌结构的方法。
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