Combining the optical diagnostics and composition detection of the plasmas, the mechanism of the ECR plasma treatment was discussed.
结合等离子体光学诊断和成分探测，分析讨论了ECR等离子处理机理。
Combining the optical diagnostics and composition detection of the plasmas, the mechanism of the ECR plasma treatment was discussed.
结合等离子体光学诊断和成分探测，分析讨论了ECR等离子处理机理。
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