The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
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