The multi-stage vacuum system and gaseous secondary electron detector(GSED) for environmental scanning electron microscope(ESEM) were simply introduced and the basic principle of ESEM was discussed.
本文简单介绍了构成环境扫描电镜（ESEM）的多级真空系统和气体二次电子探测器，描述了ESEM的基本工作原理。
The multi-stage vacuum system and gaseous secondary electron detector(GSED) for environmental scanning electron microscope(ESEM) were simply introduced and the basic principle of ESEM was discussed.
本文简单介绍了构成环境扫描电镜（ESEM）的多级真空系统和气体二次电子探测器，描述了ESEM的基本工作原理。
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