A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented.
提出一种具有绝对零位标识的光栅位移测量系统的误差补偿方法。
A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented.
提出一种具有绝对零位标识的光栅位移测量系统的误差补偿方法。
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