The relationship between the microchannel, the pool, the roughness of the chip and machining parameters of excimer laser is researched in paper.
文中对准分子激光直写刻蚀芯片微通道、池的形成机理进行研究，以及分析了键合前后微通道底面粗糙度与加工参数的关系。
Micro-excimer laser is a novel laser, and it will be used by industry on the ultraviolet-laser micro-machining.
微型准分子激光器是一种新型的激光器，它在工业紫外激光微加工上有广泛的应用前景。
Micro-excimer laser is a novel laser, and it will be used by industry on the ultraviolet-laser micro-machining.
微型准分子激光器是一种新型的激光器，它在工业紫外激光微加工上有广泛的应用前景。
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