It has a fast deposition rate and surface cleaning features, in particular strong adhesion with the film, diffraction, and can be coated material widely and so on.
它具有沉积速度快和表面清洁的特点，特别具有膜层附着力强、绕射性好、可镀材料广泛等优点。
The influences of the sputtering power on deposition rate, film structure, and contact performance of the film prepared on CdZnTe substrate have been investigated.
系统地研究了溅射功率对沉积速率、薄膜结构、组织形貌及接触性能的影响。
High ionization rate, full reaction, pure film color, fast deposition.
离化率高，膜层反应充分，使膜层颜色纯正，沉积速度快。
Experimental results show that the deposition rate of silicon film strongly depends on silane pressure and substrate temperature.
实验结果表明，非晶硅的沉积速率与气室气压和基片温度密切相关。
The influence of various experimental parameters on deposition rate film composition and hardness has been studied, Bias is considered as the most effective Darameter.
研究了各种实验参数对沉积速率、薄膜组成及膜层硬度的影响，认为偏压是最具影响的参数。
The effects of the flow rate of oxygen and pulse bias voltage on the structure, deposition rate and the surface morphology of thin film were studied.
研究了氧流量和脉冲偏压对薄膜相结构、沉积速率、表面形貌、薄膜硬度的影响。
The growth rate, film morphology, and microstructure are not sensitive to the deposition pressure.
而工作气压对生长速率、薄膜形貌和微观结构的影响不明显。
In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate.
特别是利用反应性溅射法，在低温下以高成膜速度进行堆积，得到非晶的氧化钛。
The transverse component of magnetic flux intensity is pivotal that affect the utilization rate of target material and quality of deposition film as well as the instability of the sputtering process.
利用有限元理论对靶表面磁通量密度的横向分量进行了模拟分析。
The transverse component of magnetic flux intensity is pivotal that affect the utilization rate of target material and quality of deposition film as well as the instability of the sputtering process.
利用有限元理论对靶表面磁通量密度的横向分量进行了模拟分析。
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