The utility model relates to a hollow shaft magnetic fluid sealing device of a non-locking device used for a single crystal silicon furnace and silicon chip furnace equipment.
本实用新型涉及一种用于单晶硅炉、硅芯炉设备的无锁紧装置的空心轴磁流体密封装置。
The utility model relates to a hollow shaft magnetic fluid sealing device of a non-locking device used for a single crystal silicon furnace and silicon chip furnace equipment.
本实用新型涉及一种用于单晶硅炉、硅芯炉设备的无锁紧装置的空心轴磁流体密封装置。
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