This paper introduced the design and development of silicon piezoresistive high frequency dynamic pressure sensor which used in the measurement of shock wave superpressure.
阐述了用于冲击波超压测量的压阻式高频动态压力传感器的设计与开发。
This paper introduced the design and development of silicon piezoresistive high frequency dynamic pressure sensor which used in the measurement of shock wave superpressure.
阐述了用于冲击波超压测量的压阻式高频动态压力传感器的设计与开发。
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