The heated oxidation film of U-Nb alloy is studied by auger electron spectroscopy (AES) at different temperature in the high vacuum chamber.
用俄歇电子能谱（AES）研究了高真空下，环境温度对铀铌合金真空氧化膜的影响。
The influence of water vapor content in high vacuum chamber during the coating process on physical properties of HfO2 films was investigated.
本文研究了在镀膜过程中真空室内水蒸气的含量对HfO2薄膜物理性能的影响。
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuum chamber and target stage, vacuum system and monitor system.
等离子体源离子注入装置由脉冲负高压源系统、热阴极弧放电系统、真空室及样品台、真空系统和监测系统等五部分组成。
The invention has the advantages that no oxidation, simple method, convenient operation and high efficiency are achieved since the heating treatment is conducted in the vacuum chamber;
本发明的优点是：在真空室中进行加热处理，无氧化、方法简单、操作方便、效率高；
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
Electron beam welding machine consists of electron gun, high-voltage power, vacuum unit, vacuum welding chamber, electrical control system, fixture and working station running system and etc.
电子束焊机由电子枪、高压电源、真空机组、真空焊接室、电气控制系统、工装夹具与工作台行走系统等部分组成。
In a high vacuum system, the vacuum chamber, which is commonly grounded, ACTS as the shield.
在高真空系统(真空室)中，它通常接地，起到屏蔽作用。
The result showed that the oxygen content was high at low chamber vacuum and all the film was oxide.
结果发现，当样品室真空度较低时，膜层的氧含量很高，膜层为钛的氧化物；
The air-tightness of the chamber door is adjustable, with a wholly-shaped silicon rubber door sealing loop; so as to guarantee in-chamber high vacuum.
箱门闭合松紧能调节，整体成型的硅橡胶门封圈，确保箱内高真空度。
The air-tightness of the chamber door is adjustable, with a wholly-shaped silicon rubber door sealing loop; so as to guarantee in-chamber high vacuum.
箱门闭合松紧能调节，整体成型的硅橡胶门封圈，确保箱内高真空度。
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