The character of the laser direct writing device (LDWD) is analyzed.
分析了激光写入与加工设备的特点。
To improve the precision of the laser direct writing device, researches have been done for the focusing servo system.
为了提高在激光直写设备中光刻系统的写入精度,对光探头调焦系统进行了研究。
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.
在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。
In the BOE laser direct-writing device, the adjusting effect of spindle velocity is one of the key factors for determining the lithography effectiveness and accuracy.
在二元光学元件激光直写设备中,主轴速度调节效果的好坏是决定刻划效率与精度的关键因素之一。
In the BOE laser direct-writing device, the adjusting effect of spindle velocity is one of the key factors for determining the lithography effectiveness and accuracy.
在二元光学元件激光直写设备中,主轴速度调节效果的好坏是决定刻划效率与精度的关键因素之一。
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