To give an error analysis of this effect, the propagation of partial coherent light in the proximity UV-lithography was investigated and the relative theoretical model was proposed.
为此,研究了接近式紫外光刻中部分相干光的传播过程,建立了相应的光刻理论模型,对光刻成像中的误差产生机理进行分析。
Based on the propagation law of partially coherent light, spectral changes of a polychromatic Gaussian-Schell model beam propagating in free space is studied.
基于部分相干光的传输定律,研究了多色高斯·谢尔模型光束在自由空间中传输的光谱变化。
Starting from the propagation law of partially coherent light, spectral changes in Young′s two-slit experiment with Schell model beams are studied.
从部分相干光的传输定律出发,研究了杨氏双缝实验远场的光谱变化。
Starting from the propagation theory of partially coherent light, the spectrum of twisted Gaussian Schell-model beams in the far field are studied.
从部分相干光的传输理论出发,研究了被光阑衍射扭曲高斯·谢尔模型光束远场的光谱变化规律。
A geometric ray model for the propagation of light in a step fiber is presented, and the cut-off conditions are derived.
提出阶跃光纤导光的一种几何射线模型,方便地求出了截止条件,并与光波导理论所得结果作了比较。
A novel model for light propagation in elliptical hole photonic crystal fibers (PCF) is developed with localized orthogonal function method.
采用正交函数算法,提出了一种新型椭圆孔光子晶体光纤的本地正交函数模型。
A novel model for light propagation in elliptical hole photonic crystal fibers (PCF) is developed with localized orthogonal function method.
采用正交函数算法,提出了一种新型椭圆孔光子晶体光纤的本地正交函数模型。
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