A novel route to prepare low-dielectric constant mesoporous SiO_2 films is reported in this paper.

本文报道了一种新型纳米多孔低介电常数薄膜的制备方法。

youdao

A novel route to prepare low-dielectric constant mesoporous SiO_2 films is reported in this paper.

本文报道了一种新型纳米多孔低介电常数薄膜的制备方法。

youdao