To solve the problem of MEMS vacuum package, vacuum resistance welding equipment, which contains resistance welding and vacuum system, was designed and manufactured.
为了解决MEMS器件真空封装难题，设计并研制了一台将电阻焊与真空系统集成于一体的真空电阻焊机。
To solve the problem of MEMS vacuum package, vacuum resistance welding equipment, which contains resistance welding and vacuum system, was designed and manufactured.
为了解决MEMS器件真空封装难题，设计并研制了一台将电阻焊与真空系统集成于一体的真空电阻焊机。
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