Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
This mechanism can be replaced by micro actuators or other control strategies in the future.
在将来，这个机械装置也许会被其他微执行器或者控制策略代替。
Your MICRO 1000 system in includes one of these three types of actuators.
您的系统在1000年微包括其中的三种类型的驱动器。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
Through these experiments, we find that the micro actuators vibrate in high frequency under the action of the alternating magnetic field, which make the micro robot model move forward in the water.
实验表明，该模型在交变磁场的作用下，微执行器将做高频率划动，使水下微机器人模型能够在水中产生运动。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
In recent years, micro sensors, micro actuators, and micro mechanical components were lucubrated.
近年来，微传感器，微执行器和微机械部件得到了深入的研究。
It is significant for the architecture design and the selection of the actuators to research statics of a micro-motion manipulator.
微操作机器人的静力分析对其结构设计和驱动器的选择有重要意义。
The paper introduces some applications of micro actuators according to the different drive modes.
根据微执行器的驱动方式的不同，对微执行器的应用进行了介绍。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
Then the techniques about actuators, micro displacement sensors, and micro force sensors were discussed and compared respectively as they were main parts in microscale mechanics testing.
阐述了微构件力学性能的研究现状与存在的力学性能参数表征问题，而后重点介绍了微构件力学性能测试中相关的驱动方式、微位移检测和微力检测技术。
This paper introduced characteristic of MEMS micro actuators and all kind of activate pattern. Take for Micro motor example, compare in detail perform patter and principle of Micro actuators.
文中介绍了MEMS微致动器和各类驱动模式的优缺点，并以微马达为例，详细比较了其执行机制和原理。
Electrochemical actuators have promising potential applications in the fields of micro-electromechanical systems (MEMS) and biomechanical biomedicine.
电化学驱动器在微电子制造系统(MEMS)和生物医疗领域都有广泛的应用前景。
Piezoelectric bimorph, which consists of metal thin circular plate having PZT on both sides, is used as actuators of in pipe micro locomotive mechanism.
双压电膜是由压电材料层、环氧树脂层、金属层组成的复合薄圆板。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
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