The main special machine tools and equipment for micro EDM are introduced as well.
扼要介绍了国外主要的微细电火花专用机床与设备。
A summary of the latest international achievements on micro EDM and some examples are given.
简要地综述了国际上微细电火花加工的最新进展，并给出了部分加工实例。
This paper analyses the micro EDM feasibility for semiconductor silicon from the physical properties of silicon.
从硅材料的物理性能出发，分析其微细电火花加工的可行性。
The newest trends of electrical discharge machining (EDM) including die-sinking EDM, micro EDM and wire EDM (WEDM) in Japan were presented.
综述了日本在放电加工领域的最新研究动态，包括成形放电加工、微细放电加工和线切割放电加工三部分内容。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
A high speed data acquisition system for measurement of Micro EDM discharge parameter is designed. The hardware circuits are analyzed and discussed, also the software function is present.
设计了一个用于在微细电火花加工控制中放电参数检测的高速数据采集系统，对其硬件电路进行了分析和讨论，并给出了软件说明。
Enhancing electrical erosion resistance of tool electrode and reducing electrode wear is one of research keys to fabricate HARMs with micro EDM technology reliably, stably and efficiently.
增强工具电极材料的耐电蚀能力，降低电极损耗是微细电火花加工技术可靠、稳定且高效制造高深宽比微结构和器件的研究关键之一。
In 3d scanning process of micro electro discharge machining (micro EDM), the machining efficiency and geometrical tolerance are difficult to be guaranteed due to the serious electrode wear.
进行微细电火花三维扫描加工时，由于电极损耗相对严重，导致形位公差难以保证和加工效率较低。
The accurate control of single pulse discharge energy is one of key techniques in micro-EDM.
放电单脉冲能量的精确控制是实现微细电火花加工的关键技术之一。
A novel micro electrical discharge machining (EDM) method is described.
论述了一种新的微细电火花加工方法。
According to the method of modular design of reconfigurable machine tool, a multifunctional system for micro electro-discharge machining (EDM) and electrochemical micromachining (EMM) was designed.
基于可重构机床模块化的设计方法，设计了一套可进行微细电火花加工和微细电解加工的多功能微细电加工系统。
The accurate analysis method of performances plays an important role in the optimization with multiple performance objectives of micro electrical discharge machining (EDM).
加工工艺参数准确合理的分析方法是优化组合电火花微细加工中多目标工艺参数的重要前提和保证。
The forming mechanism of different micro structures fabricated by micro electrical discharge machining (EDM) deposition was studied.
对微细电火花沉积加工中沉积所得不同微细结构的成形机理进行了研究。
It is proved that mirror EDM with mixed dielectric powders can not only decrease the surface roughness, but also improve the surface abradability, corrosion-resistance and micro - hardness.
研究结果表明，混粉电火花镜面加工不但能够显著降低加工表面粗糙度值，而且能够提高加工表面的耐磨性、耐蚀性和表层显微硬度。
The experimental results reveal that the transistor type pulse train generator is unsuitable for micro-EDM due to its low removal rate.
实验结果表明，自振式晶体管脉冲电源因其加工速度慢并不适于微细放电加工。
As a new method in the field of EDM, micro-EDM deposition (EDD) in gas is a big breakthrough in traditional manufacture.
气中微细电火花沉积加工作为电火花加工领域的一种新方法，是传统加工方法的一大突破。
The micro-energy pulse generator is one of the key components of the micro-EDM machine tool.
微能脉冲电源是微细电火花加工机床上的重要组成部分。
The applications of both of them included electrode in EDM, electroconductive diamond parts, diamond grinding wheel and micro precision grinding tools etc.
它们的应用包括放电加工用的电极、导电金刚石零件、金刚石砂轮以及精密磨削工具等。
The prospective application of micro-EDM in the manufacture of micro three-dimensional structures is discussed as well.
展望了微细电火花加工在微三维结构加工中的应用前景。
The way of realizing micro energy pulse power source is analyzed. A micro energy pulse power source used by micro-EDM is developed.
分析了微能脉冲电源的实现途径，设计开发出了满足微细电火花加工用的微能脉冲电源。
This artical deals with interpolation and frequency converter of micro-computer numerical control wire cut EDM.
本文涉及线切割机微机数控系统的插补法以及变频装置的问题。
Pulse power supply with micro energy is a core technique for micro-EDM.
微能脉冲电源是微细电火花加工的一项关键技术。
At last, the feasibility of the manufacture of micro-compressor with ECM-EDM complex technology is discussed, and advices are put forward for the later work.
最后本文探讨了一下电解电火花复合加工微型压气机的可行性，对今后的工作提出了一些意见。
Then the smaller feature size of spout holes is achieved by micro-EDM with layer-by-layer scan machining.
型孔喷口的最小特征尺寸采用微细电火花逐层扫描加工得到。
The technological features and its influential factors of high speed micro-hole EDM are expounded.
评述了高速电火花加工小孔的工艺特点及其影响。
Conventional discharge condition detection methods extracting only certain eigenvalue are not suitable for the Micro-EDM due to the high frequency and distortion of voltage wave shape.
常规放电状态检测方法由于仅采用单一的特征量进行状态判别，因此在加工信号频率高、加工波形产生畸变的微细电火花加工中，不再适用。
Though choosing the experimental results as the learning sample, the performance predictive model of EDM micro-and-small holes is proposed, with the BP algorithm of artificial neural network.
采用人工神经网络的BP算法，以电火花微小孔加工工艺参数正交实验的结果作为神经网络的学习样本，建立电火花微小孔加工多目标工艺参数的预测模型。
Though choosing the experimental results as the learning sample, the performance predictive model of EDM micro-and-small holes is proposed, with the BP algorithm of artificial neural network.
采用人工神经网络的BP算法，以电火花微小孔加工工艺参数正交实验的结果作为神经网络的学习样本，建立电火花微小孔加工多目标工艺参数的预测模型。
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