A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.
微型机电系统是一个新兴的技术领域，其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等，有广泛的应用前景。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
The transient characteristics of the dynamic stress of MEMS (Micro Electro Mechanical system) decides that it is hard to be measured directly by using the traditional stress measurement system.
微机电系统(MEMS)动态应力的瞬态特性决定了传统的应力测试系统无法直接满足它的测试需要。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统，测量了谐振器的振动速度。
A method is presented to manipulate microspheres using liquid bridge forces to overcome the influence of adhesion during micro-electro-mechanical system assembly.
为了克服粘着对微机电系统装配的影响，提出了一种利用液体桥力实现微球转移操作的方法。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
Communication is a very important application domain of micro electro opto mechanical system (MOEMS).
通信是微型光电机械系统技术的一个非常重要的应用领域。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
With the development of the Micro Electro-Mechanical System(MEMS), it becomes possible for microneedles array to strengthen the transdermal drug delivery.
利用微针阵列实行局部定时地释放药物、控制药量，微针阵列的研制是微驱动器的关键。
Micro-optical -electro-mechanical-system(MOEMS)have received a great of interest and attention from research labs and from the industry.
微光电子机械系统（MOEMS）已经在业界受到研究人员和相关人士的极大关注。
Objective To observe the growing shape and function of Madin-Darby canine kidney (MDCK) cells implanted on the polysilicon nanopore membrane by micro-electro-mechanical system (MEMS).
目的 利用多晶硅纳米孔技术人工合成一种多孔隙薄膜，并在薄膜上培养狗肾脏细胞（MDCK），观察细胞生长情况及膜的生物相容性。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
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