MEMS(Micro Electronic Mechanical System) accelerometers have wide applications in gauge check.
MEMS加速度传感器在计量检测中有着广泛的应用。
Therefore, embedding nerve prosthesis prepared by micro electronic mechanical system (MEMS) technique as treatment for peripheral nerve damage has been dug deeper in animal and clinical study.
因此，应用微机电系统技术制备的可植入神经假体治疗周围性神经损伤疾病在动物研究和临床工作得到进一步的深入。
The invention relates to a structure for increasing strength and service life of a deformable beam and an application thereof, belonging to the field of micro-electronic mechanical system (MEMS).
本发明涉及一种增加变形梁强度和使用寿命的结构及其应用，属于微电子机械系统(MEMS)领域。
The invention relates to a structure for increasing strength and service life of a deformable beam and an application thereof, belonging to the field of micro-electronic mechanical system (MEMS).
本发明涉及一种增加变形梁强度和使用寿命的结构及其应用，属于微电子机械系统(MEMS)领域。
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