The results of research are helpful to the design, fabrication and application of the electrostatic torsion microactuator.
所得研究结论对扭转式静电微驱动机构的设计与应用提供了一定的理论依据。
The results of research are helpful to the design, fabrication and application of the electrostatic torsion microactuator.
所得研究结论对扭转式静电微驱动机构的设计与应用提供了一定的理论依据。
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