The fluorine mixed gas prepared by this device, which may prolong the working hours of excimer-laser 2 to 3 times and prolong the average useful time of lens of laser 3 to 5 times.
按规程应用该装置配制的含氟混合气，可以使准分子激光器的有效工作时间延长2 ~3倍，激光器中镜面的使用寿命平均延长3 ~5倍。
The fluorine mixed gas prepared by this device, which may prolong the working hours of excimer-laser 2 to 3 times and prolong the average useful time of lens of laser 3 to 5 times.
按规程应用该装置配制的含氟混合气，可以使准分子激光器的有效工作时间延长2 ~3倍，激光器中镜面的使用寿命平均延长3 ~5倍。
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