At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
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