Compared with the technology for binary optical mask, the technology has the following strong points: process simplification, short period of fabrication and easy operation.
与二元光学元件掩模的制作工艺相比，该技术具有工艺简单、制作周期短且易于操作的优点。
Its optical density, with help from a metallic layer, has been achieved at 5.5. Since this organic material is a negative photoresist, the fabrication process is rather simple.
借助金属层，其光学密度已达到5.5。由于这种有机材料是负性光敏抗蚀剂，所以加工过程相当简单。
It is proved that the fabrication process was adjustable with parameters and reliable on repeatability, which makes it suitable for optical power splitters with high performance.
分析表明，这种光波导制备技术参数可控，且重复性好，可用于低损耗光功分器件的制作。
It is proved that the fabrication process was adjustable with parameters and reliable on repeatability, which makes it suitable for optical power splitters with high performance.
分析表明，这种光波导制备技术参数可控，且重复性好，可用于低损耗光功分器件的制作。
应用推荐