An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.
提出了一种基于强度调制型空间光调制器(SL M)的并行激光直写系统，建立了该系统的数学模型。
An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.
提出了一种基于强度调制型空间光调制器(SL M)的并行激光直写系统，建立了该系统的数学模型。
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