Around the goal of a MEMS photo-acoustic cell, this paper developed a highly sensitive miniaturized infrared photo-acoustic system.

围绕着光声腔mems化的目标，本文研制了一种高灵敏度小型化的谐振式红外光声气体传感系统。

youdao

Around the goal of a MEMS photo-acoustic cell, this paper developed a highly sensitive miniaturized infrared photo-acoustic system.

围绕着光声腔mems化的目标，本文研制了一种高灵敏度小型化的谐振式红外光声气体传感系统。

youdao