The invention relates to a photoelectrical Angle sensor with three-layer semiconductor structure, which belongs to the field of semiconductor technology.
本发明涉及一种三层结构的半导体光电角度传感器，属于半导体技术领域。
The invention relates to a photoelectrical Angle sensor with three-layer semiconductor structure, which belongs to the field of semiconductor technology.
本发明涉及一种三层结构的半导体光电角度传感器，属于半导体技术领域。
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