We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
The dynamic characteristics of accelerometers working on gyro free micro inertial measurement units was discussed, with a piezoresistive accelerometer as an example.
本文以压阻式加速度计为例，探讨了其动态特性对无陀螺微惯性测量组合的影响。
A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
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