A model for compensation of radial shift was established to further improve fabrication precision during polar laser direct writing.
为了进一步提高光学元件的线条制作精度,建立了极坐标激光直写时线条中心径向漂移的补偿模型。
A model for compensation of radial shift was established to further improve fabrication precision during polar laser direct writing.
为了进一步提高光学元件的线条制作精度,建立了极坐标激光直写时线条中心径向漂移的补偿模型。
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