• A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.

    解决悬臂结构射频微机系统开关残余应力的作用下会发生翘曲的问题,提出悬臂的顶端引入斜拉梁的方法。

    youdao

  • A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.

    解决悬臂结构射频微机系统开关残余应力的作用下会发生翘曲的问题,提出悬臂的顶端引入斜拉梁的方法。

    youdao

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