The aim and the method of mass spectrum analysis for residual gas and the differential pumping system, meanwhile, are introduced.
介绍进行残气质谱分析的目的，方法和采用的差分抽气质谱分析系统； 给出装置调试过程中常温和低温状态下残气谱图；
The aim and the method of mass spectrum analysis for residual gas and the differential pumping system, meanwhile, are introduced.
介绍进行残气质谱分析的目的，方法和采用的差分抽气质谱分析系统； 给出装置调试过程中常温和低温状态下残气谱图；
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