The aim and the method of mass spectrum analysis for residual gas and the differential pumping system, meanwhile, are introduced.
介绍进行残气质谱分析的目的,方法和采用的差分抽气质谱分析系统; 给出装置调试过程中常温和低温状态下残气谱图;
The aim and the method of mass spectrum analysis for residual gas and the differential pumping system, meanwhile, are introduced.
介绍进行残气质谱分析的目的,方法和采用的差分抽气质谱分析系统; 给出装置调试过程中常温和低温状态下残气谱图;
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