In this paper, we introduce some basic conceptions of RF MEMS switch such as the switch parameters, classification, typical fabrication process and design considerations.
本文着重介绍了RF MEMS开关的基本参数、分类以及典型制造工艺和设计时考虑因素等一些基本的概念。
As one of the most important MEMS devices, RF MEMS switches have been applied in front-end circuits of some microwave systems, antenna and phase shift architectures.
射频MEMS开关是重要的射频MEMS器件，一些RF MEMS开关已经应用于部分微波系统的前端电路、数字电容器组和移相网络。
A novel capacitive switches structure for the distributed RF MEMS phase shifters is presented based on the analysis of the operation principle.
通过分析MEMS电容开关的工作原理，设计出一种适合分布式射频MEMS移相器电路的新型电容开关。
The frequency equation of RF MEMS switches was derived by separation of variable.
利用变量分离法推导出桥模式RF MEMS开关的频率方程组。
The design and fabrication of a capacitive series RF MEMS switch is reported.
介绍了一种串联电容式RF MEMS开关的设计与制造。
On this basis, the operational principle of a tri-state latching RF MEMS switch is illustrated.
在此基础上，扩展到一种三态锁存RF MEMS开关，简要阐述了其工作原理。
Design, fabrication and test results of DC-contact Cantilever RF MEMS Series Switches are reported.
报道了悬臂梁接触式RF MEMS开关的设计、制作和测试结果。
RF MEMS switch is designed by computer aided design (CAD) method.
应用计算机辅助设计(CAD)方法模拟设计一种射频微机械(RF - MEMS)开关。
So it's necessary to analyze the electromagnetic shielding of RF MEMS switches and MEMS systems, but no such document about it has been published.
因此，有必要对RF MEMS开关与MEMS系统进行电磁屏蔽分析，而目前还没有查阅到文献在这方面进行过研究。
The fractal theory, fractal antenna, the RF MEMS switch and the Reconfigurable fractal antenna with integrated MEMS switches are investigated in this paper.
本论文综合研究了分形技术、分形天线、RF MEMS开关和集成MEMS开关的可重构分形天线等问题。
This paper based on the technology of RF MEMS and focused on RF MEMS switches and phase shifters.
本文介绍了MEMS技术的基本知识。重点研究了MEMS开关及其组件MEMS移相器。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
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