Surface damage caused by cutting on Si, InSb, HgCdTe has been studied by Reflection High Energy Electron Diffraction (RHEED) after step-etching the samples.
利用高能反射电子衍射技术（RHEED），研究了硅、锑化铟、碲镉汞样品逐次化学腐蚀后的切割表面损伤。
Reflection High Energy Electron Diffraction (RHEED);
反射式高能电子衍射；
Reflection High Energy Electron Diffraction (RHEED);
反射式高能电子衍射；
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