Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
In the paper, computer aided design (CAD) technology is used to achieve simulation of sacrificial layer etching.
本文将利用计算机辅助设计(CAD)技术实现腐蚀过程的模拟。
In the paper, computer aided design (CAD) technology is used to achieve simulation of sacrificial layer etching.
本文将利用计算机辅助设计(CAD)技术实现腐蚀过程的模拟。
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