On the basis of SAW technology, this thesis designs a SAW humidity sensor. Include the design of IDT (interdigital transducer), the thin film as well as the frequency measurement system.
在对SAW传感器技术进行研究的基础上，本文设计了一个SAW湿度传感器，包括IDT(叉指换能器)的设计、薄膜的设计以及频率测量系统的设计。
SAW excited by input interdigital transducer is divided centrosymmetrically into two paths detected by their output interdigital transducer.
它将输入叉指换能器激发的SAW中心对称分成两路并由各自的输出叉指换能器检测输出。
SAW excited by input interdigital transducer is divided centrosymmetrically into two paths detected by their output interdigital transducer.
它将输入叉指换能器激发的SAW中心对称分成两路并由各自的输出叉指换能器检测输出。
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