The main factors affecting the quality of semiconductor heterostructure epitaxy chips, inspection methods and some typical test results have beeen introduced in this pater.
本文介绍了影响半导体异质外延晶片质量的主要因素,检测方法,几个典型测试结果。
The main factors affecting the quality of semiconductor heterostructure epitaxy chips, inspection methods and some typical test results have beeen introduced in this pater.
本文介绍了影响半导体异质外延晶片质量的主要因素,检测方法,几个典型测试结果。
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