A method for improving the critical dimension uniformity of a patterned feature on a wafer in semiconductor and mask fabrication is provided.
一种在半导体与罩幕制造中改善晶圆上的图案化特征结构的临界尺寸均匀性的方法。
Furthermore, we also provide a method for critical nodes selection based on modal analysis, which aims at reducing the huge dimension of injection space.
基于模态分析,提出了选择系统关键节点的方法,以实现注入空间的有效降维。
The result shows that, the critical point of the Gauss model depends not only on the spatial dimension of the system, but also on the coordination number of the site.
结果表明,系统的临界点不仅与空间维数有关,还与晶格格点的配位数有关;
The model was analyzed and established, then the formula of critical dimension was got, which was related to the temperature distribution of heater tip.
根据传热学建立了脉冲热压焊的焊咀温度分布模型,对该模型进行分析、计算,得到了焊咀端部温度分布是否分布均匀的临界尺寸公式。
With the aid of the hermeneutic dimension of critical theory, Habermas cleared the ground for the final completion of "foundation reconstruction" of his communication theory.
借助批判理论的诠释学维度,哈贝马斯为交往行为理论最终完成“基础重建”清理了地基。
It shows that the dimension of gage (the central portion with equal section) is critical for the stress distribution in the dog-bone-shaped specimen.
结果表明:狗骨形试样中,中间等截面段尺寸对试样中应力的大小、分布影响很大。
Renormalization group method which calculates fractal dimension theoretically is the most useful tool when we study critical phenomena of phase transition.
重整化群方法是研究相变的临界现象最有力的工具,它是一种由理论求得分形维数的方法。
There is a maximum critical value in the cylindrical shell of certain dimension.
研究发现,一定尺寸的圆柱壳有一个最大临界值。
This reflection surpassed the limits of his age and showed concern over the destiny of mankind in general, thereby revealing the humanistic dimension of Marx's critical theory and pursuit.
这种反思超越了时代的局限,成为对人的普遍命运的关注,体现了马克思批判理论的人文向度。
The mechanism of low voltage miniature circuit breaker is very complicate, thus its assembly dimension chain and the tolerance of critical dimensions are researched.
由此,对微型断路器机构的装配尺寸链和关键尺寸公差进行了研究。
We show the existence of blow-up solutions for a coupled nonlinear wave system with critical power in dimension two.
二维空间中一类具临界幂的耦合非线性波动系统的爆破解 李晓光;
The strategic level of learning is an important dimension in measuring an individual's learning capability, and also one of critical factors that restricts learning effects.
学习策略水平是衡量个体学习能力的重要尺度,是制约学习效果的重要因素之一。
Their affinities are still unclear, but they may provide a critical new dimension to the record of the initial phase of animal evolution and biomineralization.
这些化石的亲缘关系仍不清楚,但它们为我们提供了动物演化和矿化初始阶段的化石记录。
Thereinto forecasting of water requirement is the datum basic and critical condition of multi-dimension critical adjustment model;
其中需水预测最终为多维临界调控模型提供数据基础和边界条件;
Using the real-space renormalization group transformation method, critical behavior on two-dimension and d-dimension(d>2) X fractal lattices is studied.
采用实空间重整化群变换的方法,研究了2维和d(d>2)维X分形晶格上的临界性质。
Using the real-space renormalization group transformation method, critical behavior on two-dimension and d-dimension(d>2) X fractal lattices is studied.
采用实空间重整化群变换的方法,研究了2维和d(d>2)维X分形晶格上的临界性质。
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