With decreasing the film thickness, both the dislocation spacing and the ratio of the dead layer to film total thickness increase.
随着薄膜厚度的减小,位错间距增大,“死层”厚度与薄膜总厚度之比增加。
With decreasing the film thickness, both the dislocation spacing and the ratio of the dead layer to film total thickness increase.
随着薄膜厚度的减小,位错间距增大,“死层”厚度与薄膜总厚度之比增加。
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