Precision machining, as a manufacturing technique of micro - optical components, has many advantages which are difficult or even impossible for other traditional methods.
超精密机械加工技术作为微光学元件的一种制造方法，具有很多其他传统方法所不具有的优点。
The traditional machining methods are not only low productivity, but also low precision.
传统的加工工艺和手段，生产率低、精度差。
On ultra precision cutting, grinding and non-traditional machining, there is a hard problem between long travel and high precision, especially in multi-coordinate machining.
在超精密切削、磨削、特种加工中，大行程驱动与高精度进给是难以解决的矛盾，也是多坐标超精密加工的难点。
Aimed at tri-coordinate ultra precision machining, a stage used for tri-coordinate non-traditional machining was designed, which realizes long travel tri-coordinate ultra precision machining.
本文以三维结构的超精密加工为对象，进行了适合超精密三维结构特种加工运动平台的设计，实现了较大行程的三维精密运动。
Aimed at tri-coordinate ultra precision machining, a stage used for tri-coordinate non-traditional machining was designed, which realizes long travel tri-coordinate ultra precision machining.
本文以三维结构的超精密加工为对象，进行了适合超精密三维结构特种加工运动平台的设计，实现了较大行程的三维精密运动。
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