To meet the demands of transparent electrodes of OLED devices, ITO films were deposited at low substrate temperature, and their performances were discussed in this paper.
本论文针对OLED器件透明电极的要求，对ITO膜的低温制备工艺进行了深入的研究。
To meet the demands of transparent electrodes of OLED devices, ITO films were deposited at low substrate temperature, and their performances were discussed in this paper.
本论文针对OLED器件透明电极的要求，对ITO膜的低温制备工艺进行了深入的研究。
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